ADS Based 1D Model of Solidly Mounted FBARs Including Longitudinal and Shear Waves-Reference-Cited by-同舟云学术

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ADS Based 1D Model of Solidly Mounted FBARs Including Longitudinal and Shear Waves

Published:2012-01 Issue:1 Volume:134 Page:75-80
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Gevorgian S.¹,Vorobiev A.¹

Affiliation:

1. a Chalmers University of Technology , 41296 , Gothenburg , Sweden

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584587.2012.665295

Reference5 articles.

1. Shear mode coupling and tilted grain growth of AlN thin films in BAW resonators

2. Marksteiner, S., Kaitila, J., Fattinger, G. G. and Aigner, R. 2005. Optimisation of acoustic mirrors for solidly mounted BAW resonators, 329–332. Ultrasonic Symposium.

3. US patent 7684109 B2. March 2010.

4. dc field and temperature dependent acoustic resonances in parallel-plate capacitors based on SrTiO3 and Ba0.25Sr0.75TiO3 films: Experiment and modeling

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Flexible film bulk acoustic resonators and filter-like structure made directly on polymer substrates;Integrated Ferroelectrics;2016-01-02

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