Process research on micro-machining diamond microgroove by femtosecond laser

Author:

Dou Jian12,Sun Yu12,Xu Muxun12,Cui Jianlei123,Mei Xuesong12,Wang Wenjun12,Wang Xintian12

Affiliation:

1. State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, P. R. China;

2. Shaanxi Key Laboratory of Intelligent Robots, Xi'an Jiaotong University, Xi'an, P. R. China;

3. State Key Laboratory of Transient Optics and Photonics, Xi’an Institute of Optics and Precision Mechanics of Chinese Academy of Sciences, Xi’an, P. R. China

Funder

National Natural Science Foundation of China

Program for Changjiang Scholars and Innovative Research Team in University

Natural Science Basic Research Plan in Shaanxi Province of China

Open Research Fund of State Key Laboratory of Transient Optics and Photonics

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

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3. Input-shaping-based improvement in the machining precision of laser micromachining systems;The International Journal of Advanced Manufacturing Technology;2023-02-07

4. Femtosecond laser micromachining study with multiple wavelengths in CVD diamond;Diamond and Related Materials;2023-01

5. Microgroove machining characteristics of Si3N4 ceramics by dual-beam coupled nanosecond laser;Seventeenth National Conference on Laser Technology and Optoelectronics;2022-12-16

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