A Flowmeter with Piezoresistive Metal Layer Deposited with Focused-Ion-Beam System-Reference-Cited by-同舟云学术

A Flowmeter with Piezoresistive Metal Layer Deposited with Focused-Ion-Beam System

Published:2014-06-16 Issue:1 Volume:157 Page:157-167
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Choi Dae Keun¹,Lee Sang Hoon¹²

Affiliation:

1. Seoul National University of Science and Technology, Graduate School of NID Fusion Technology, Gongreung 2-dong, Nowon-gu, Seoul, Republic of Korea,, 139-743

2. Seoul National University of Science and Technology, Department of Mechanical and Automotive Engineering, Gongreung 2-dong, Nowon-gu, Seoul, Republic of Korea, 139-743

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584587.2014.912910

Reference20 articles.

1. Air-flow sensor and humidity sensor application to neonatal infant respiration monitoring

2. Monolithic integration of micro-channel on disposable flow sensors for medical applications

3. Sensor for Continuous Measurement of the Ventilation Rate in Livestock Buildings

4. The effect of ceiling configurations on indoor air motion and ventilation flow rates

5. Sensitivity enhancement of a silicon micro-machined thermal flow sensor

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