Single Crystal Bulk Acoustic Resonator for 5 GHz and High-Power Applications-Reference-Cited by-同舟云学术

Single Crystal Bulk Acoustic Resonator for 5 GHz and High-Power Applications

Published:2021-11-22 Issue:1 Volume:221 Page:64-72
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Lu Leihe¹²³,Jin Hao¹²³,Dong Shurong¹²³,Xuan Weipeng⁴,Fang Zijing¹²³,Luo Jikui¹²³

Affiliation:

1. Key Lab. of Advanced Micro/Nano Electronic Devices & Smart Systems of Zhejiang, College of ISEE, Zhejiang University, Hangzhou, China

2. Hangzhou Global Scientific and Technological Innovation Center, Zhejiang University, Hangzhou, China

3. College of Information Science & Electronic Engineering, Zhejiang University, Hangzhou, China

4. Ministry of Education Key Laboratory of RF Circuits and Systems, College of Electronics & Information Hangzhou Dianzi University, Hangzhou, China

Funder

National Key R&D Program of China

NSFC-Zhejiang Joint Fund for the Integration of Industrialization and information

Zhejiang Province Key R & D programs

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584587.2021.1965833

Reference23 articles.

1. Holey Glide-Symmetric Filters for 5G at Millimeter-Wave Frequencies

2. R. C. Ruby et al., Thin film bulk wave acoustic resonators (FBAR) for wireless applications. 1, 813 (2001). DOI: 10.1109/ULTSYM.2001.991846.

3. PCS 1900 MHz duplexer using thin film bulk acoustic resonators (FBARs)

4. M. A. Dubois et al., Integration of high-Q BAW resonators and filters above IC, ISSCC. 2005 IEEE International Digest of Technical Papers. Solid-State Circuits Conference; San Francisco, CA, 392–606; (2005). DOI: 10.1109/ISSCC.2005.1494034.

5. Correlations between microstructure and Q-factor of tunable thin film bulk acoustic wave resonators

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