Preparation of Aluminum-Based Porous Al <sub>2</sub> O <sub>3</sub> Humidity-Sensitive Thin Film Sensors by Microarc Oxidation-Reference-Cited by-同舟云学术

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Preparation of Aluminum-Based Porous Al ₂ O ₃ Humidity-Sensitive Thin Film Sensors by Microarc Oxidation

Published:2024-01-02 Issue:1 Volume:240 Page:113-120
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Xing Junqing¹,Xu Meiqi¹^ORCID,Xu Kangcai¹,Yang Chengtao¹²

Affiliation:

1. State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, China

2. Yangtze Delta Region Institute (Huzhou), University of Electronic Science and Technology of China, Huzhou, China

Publisher

Informa UK Limited

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584587.2023.2296321

Reference20 articles.

1. Porous alumina based capacitive MEMS RH sensor

2. Design and Fabrication of PVA-Based Relative Humidity Sensors Using Thick Film Technology

3. Humidity-resistant gas sensors based on SnO2 nanowires coated with a porous alumina nanomembrane by molecular layer deposition

4. A novel humidity sensor based on alumina nanowire films

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