On the nature of the phases formed when metals are implanted with oxygen or nitrogen
Author:
Affiliation:
1. a IBM Thomas J. Watson Research Center , Yorktown Heights, New York, 10598, U.S.A
Publisher
Informa UK Limited
Subject
General Engineering
Link
https://www.tandfonline.com/doi/pdf/10.1080/00337578208223015
Reference131 articles.
1. An attempt to understand preferential sputtering
2. On the problem of whether mass or chemical bonding is more important to bombardment-induced compositional changes in alloys and oxides
3. Ion bombardment of group IV elemental metal and synthetic nitride films
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2. Structure and phase transformations caused by oxygen ion implantation into titanium;Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques;2012-07
3. Formation of buried oxide layers in molybdenum by high-fluence oxygen ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2000-03
4. Study of Nitrogen Implanted in Aluminum at Various Doses;Materials and Manufacturing Processes;1995-03
5. The study of the transformation mechanism of Cr to Cr-nitride by N+ implantation;Vacuum;1992-11
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