The effects of phosphorus implantation on the anodic oxidation of silicon
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Published:1984-01
Issue:3-4
Volume:84
Page:223-237
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ISSN:0033-7579
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Container-title:Radiation Effects
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language:en
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Short-container-title:Radiation Effects
Author:
Kisielewicz Mikołaj
Publisher
Informa UK Limited
Subject
General Engineering