Computer simulation of single-crystal and polycrystal sputtering I-Reference-Cited by-同舟云学术

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Computer simulation of single-crystal and polycrystal sputtering I

Published:1983-01 Issue:1-4 Volume:70 Page:65-83
ISSN:0033-7579
Container-title:Radiation Effects
language:en
Short-container-title:Radiation Effects

Author:

Shulga V. I.

Publisher

Informa UK Limited

Subject

General Engineering

Link

http://www.tandfonline.com/doi/pdf/10.1080/00337578308219206

Reference39 articles.

1. Sputtering by Particle Bombardment I

2. Jackson, D. P. 1980.Proc. of Symp. on Sputtering., Edited by: Varga, P., Betz, G. and Viehböck, F. P. pp. 2–35. Austria: Perchtoldsdorf/Vienna.

3. Computer simulation of atomic-displacement cascades in solids in the binary-collision approximation

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