Atomic excitations in sputtering processes
Author:
Publisher
Informa UK Limited
Subject
General Engineering
Link
http://www.tandfonline.com/doi/pdf/10.1080/00337578208242783
Reference26 articles.
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5. Nikitin, E. E. 1974.Theory of Elementary Atomic and Molecular Processes in Gasses331Oxford: Clarendon Press. See e.g.
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