Quantitative analysis of channeling data for the determination of the amorphous fraction in ion bombarded single crystals

Author:

Benyagoub A.,Thomé L.

Publisher

Informa UK Limited

Subject

General Engineering

Reference14 articles.

1. Depth Profiles of the Lattice Disorder Resulting from Ion Bombardment of Silicon Single Crystals

2. Doctorat ďEtat Thesis;Benyagoub A.,1986

3. Thomé, L. 1986. Proc. of the Int. Workshop onSolid State Reactions after Ion Implantation Detected by Nuclear Methods. 1986, Göttingen.

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