Scattering of molecular ions by solid surfaces

Author:

Dodonov A. I.,Mashkova E. S.,Molchanov V. A.

Publisher

Informa UK Limited

Subject

General Engineering

Reference45 articles.

1. Sputtering by Particle Bombardment I

2. Dorozhkin, A. A. and Petrov, N. N. Proceedings of LPI No 371. Leningrad: The Physics of a Surface and Near Surface Region (Actual Problems of Physical Electronics). (In Russian.)

3. Einspruch, N. G. and Brown, D. M., eds. 1984. “VLSI Electronics. Microstructure Science, #. 8, Plasma Processing for VLSI”. Academic Press.

4. Electron emission from aluminum and copper under molecular-hydrogen-ion bombardment

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1. Inelastic processes on molecule scattering by solid surfaces;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-03

2. Molecule dissociation via electron transition at grazing scattering on solid surfaces;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1990-05

3. 83O2 - 91X2;Landolt-Börnstein - Group III Condensed Matter

4. 54H - 83O1;Landolt-Börnstein - Group III Condensed Matter

5. Table 2 (part 2) and Table 3;Landolt-Börnstein - Group III Condensed Matter

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