Design and fabrication of a micromachined resonant gyroscope

Author:

Tay Francis E. H.,Liang Yung C.,Logeeswaran V. J.

Publisher

Informa UK Limited

Subject

Electrical and Electronic Engineering

Reference13 articles.

1. Bernstein, J., Cho, S., King, A. T., Kourepenis, A., Maciel, P. and Weimberg, M. A micromachined comb-drive tuning fork rate gyroscope. MEMS Proceedings. February7-10, Fort Lauderdale, FL. pp.143–148.

2. Boxenhorn, B. and Greiff, P. A vibratory micromechanical gyroscope. AIAA Guidance & Controls Conference. August15–17, Minneapolis. pp.1033–1040.

3. Buser, R. B. and De Rooij, N. F. Tuning forks in silicon. IEEE MicroElectroMechanical Systems Workshop. February20–22, Salt Lake City, UT. pp.94–95.

4. John, P., Tee, A., Sridhar, U., Jin, L. L. and Sooriakumar, K. Application of silicon surface micromachining technology to accelerometer fabrication. Proceedings of International MEMS Workshop. December, Singapore.

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