The sputtering of metals with noble gas ions; an experiment to determine the fate of the injected gas and its influence on the sputtering process
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Published:1964-02
Issue:98
Volume:9
Page:343-347
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ISSN:0031-8086
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Container-title:Philosophical Magazine
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language:en
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Short-container-title:Philosophical Magazine
Publisher
Informa UK Limited
Cited by
34 articles.
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