Reversible change in sheet resistivity of Ar−ion implanted diamond by controlling two target temperatures during ion implantation

Author:

Sato Susumu,Watanabe Hiroshi,Takahashi Katsuo,Iwaki Masaya

Publisher

Informa UK Limited

Subject

Condensed Matter Physics,General Materials Science,Nuclear and High Energy Physics,Radiation

Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Graphitization of a Polycrystalline Diamond under High-Fluence Irradiation with Noble Gas and Nitrogen Ions;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2017-11

2. The conductivity of high-fluence noble gas ion irradiated CVD polycrystalline diamond;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2017-09

3. Influence of the substrate bias potential on the properties of ta-C coatings deposited using Venetian blind plasma filter;Thin Solid Films;2015-04

4. Ion Beam Modification of Carbon Materials;Solid State Phenomena;2005-10

5. Electrochemical characterization for ion-implanted materials surfaces;Colloids and Surfaces B: Biointerfaces;2000-12

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