Subject
Condensed Matter Physics,General Materials Science,Nuclear and High Energy Physics,Radiation
Cited by
5 articles.
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1. Enhanced Diffusion of Dopants at Concentrations near the Solubility Limit;Journal of The Electrochemical Society;1994-12-01
2. Simulation of various diffusion processes in implanted silicon;Radiation Effects and Defects in Solids;1994-06
3. The influence of the solubility limit on diffusion of phosphorus and arsenic into silicon;Applied Physics A Solids and Surfaces;1994-02
4. Diffusion phenomena in Sb-implanted silicon;Radiation Effects and Defects in Solids;1993-03
5. Theory of diffusion processes in implanted silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-01