Design and Fabrication of Micro Channels for MEMS Applications

Author:

Kumara Guruparan G.1,Sathish M.1,Sankara Subramaniam N.2,Sorna Kumar T.1

Affiliation:

1. a Department of Mechanical Engineering , Thiagarajar College of Engineering , Madurai, Tamil Nadu State, India

2. b Department of Physics , Thiagarajar College of Engineering , Madurai, Tamil Nadu State, India

Publisher

Informa UK Limited

Subject

Inorganic Chemistry,Physical and Theoretical Chemistry

Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. 3-D fabrication using electrical discharge-milling: an overview;Materials and Manufacturing Processes;2022-05-28

2. Meso scale component manufacturing: a comparative analysis of non-lithography and lithography-based processes;Journal of Micromechanics and Microengineering;2022-05-12

3. Effect of tool materials on performance of rotary tool micro-USM process during fabrication of microchannels;Journal of the Brazilian Society of Mechanical Sciences and Engineering;2019-09-17

4. On effect of tool rotation on performance of rotary tool micro-ultrasonic machining;Materials and Manufacturing Processes;2018-11-13

5. High pressure abrasive slurry jet micro-machining using slurry entrainment;The International Journal of Advanced Manufacturing Technology;2015-09-08

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