1. Institute of Solid State Physics, Russian Academy of Sciences, Chernogolovka, Russia
2. Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, Chernogolovka, Russia
3. National University of Science and Technology MISiS, Moscow, Russia
4. Institute of Chemical Reagents and High Purity Chemical Substances of National Research Center, «Kurchatov Institute», Moscow, Russia