Modelling of semiconductor wafer fabrication systems by extended object-oriented Petri nets
Author:
Publisher
Informa UK Limited
Subject
Industrial and Manufacturing Engineering,Management Science and Operations Research,Strategy and Management
Link
http://www.tandfonline.com/doi/pdf/10.1080/0020754042000264563
Reference20 articles.
1. A generalized stochastic petri net model for performance analysis and control of capacitated reentrant lines
2. Adaptive production scheduling of virtual production systems using object-oriented Petri nets with changeable structure
3. Modelling and analysis of wafer fabrication scheduling via generalized stochastic Petri net and simulated annealing
4. Coloured Petri Nets
Cited by 18 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Guidance performance evaluation method for infrared imaging guided missile based on extended object-oriented Petri net;Optik;2019-05
2. 9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs;Wafer Fabrication;2018-09-24
3. Minimizing total earliness and tardiness on re-entrant batch processing machine with time windows;MATH COMP MODEL DYN;2018
4. A slack optimization unified model of regrouping and sequencing batches for β1 → β2 manufacturing system;Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture;2017-11-06
5. Combined scheduling algorithm for re-entrant batch-processing machines in semiconductor wafer manufacturing;International Journal of Production Research;2014-10
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3