1. 1) The Japan Society of Applied Physics, ed.: Hakumaku Sakusei Handbook (Thin Films Fabrication Handbook), (Kyoritu Press, Tokyo, 1994) [in Japanese].
2. 2) A. Kinbara: Buturi Kougaku Jikken 5, Hakumakuno Kihon Gijyutu (Physical Engineering Experiment 5, Basic Technique of Thin Films), (University of Tokyo Press, Tokyo, 1987) [in Japanese].
3. 3) K. Wasa and S. Hayakawa: Hakumakuka Gijyutu (Thin Films Fabrication Technology), (Kyoritu Press, Tokyo, 2002) 3rd ed. [in Japanese].
4. 4) E. Kusano: Hajimeteno Hakumaku Sakusei Gijyutu (Thin Films Fabrication Technique for Biginners)(Kogyo Chosakai Publishing Co., Ltd., Tokyo, 2006) [in Japanese].
5. 5) H. Kojima: Genbano Sputtering Hakumaku Q&A (Q&A of Sputtering Thin Films on-site), (Nikkan Kogyo Shimbun, Tokyo, 2008) [in Japanese].