Author:
TAMANO Junji,YAMADA Masao,ICHIKAWA Masami,YONEDA Katsumi,MORITA Shinzo,HATTORI Shuzo
Publisher
The Vacuum Society of Japan
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics
Cited by
2 articles.
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1. Applications of Plasma Polymers;Plasma Deposition, Treatment, and Etching of Polymers;1990
2. H2 plasma development of X-ray imaged patterns on plasma-polymerized resists;Plasma Chemistry and Plasma Processing;1984-06