Quick Pumping to Ultra High Vacuum without Baking and its Electric Power Saving Effect by Reduction of Water Vapor in Exposure Gas-Reference-Cited by-同舟云学术

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Quick Pumping to Ultra High Vacuum without Baking and its Electric Power Saving Effect by Reduction of Water Vapor in Exposure Gas

Published:2014 Issue:3 Volume:57 Page:96-101
ISSN:1882-2398
Container-title:Journal of the Vacuum Society of Japan
language:en
Short-container-title:J. Vac. Soc. Jpn.

Author:

YAMAZAKI Ko,SHIKE Junichi,YAMAGATA Motoi,KATO Hiroyuki,KITANO Masahiro,KATO Shigeki

Publisher

The Vacuum Society of Japan

Subject

Spectroscopy,Surfaces and Interfaces,Instrumentation,General Materials Science

Reference10 articles.

1. 1) S. Kato: J. Spectroscopic. Soc. Japan, 44 (1995) 81.

2. 2) S. Kato, M. Aono K. Sato and Y. Baba: J. Vac. Sci. Technol. A, 8 (1990) 2860.

3. 3) S. Kato: J. Japan Inst. Metals, 32 (1993) 727.

4. 4) M. Miki: Doctoral thesis of the graduate university for advanced studies (1994).

5. 5) K. Takahashi and M Edamura: Shinku, 36 (1993) 152.

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1. Maintenance of Ultra-High Vacuum Instruments;Vacuum and Surface Science;2018-08-10

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