Formation of Isotopically Enriched Silicon Film from Fluorosilane Produced by Isotopically Selective Infrared Multiphoton Dissociation-Reference-Cited by-同舟云学术

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Formation of Isotopically Enriched Silicon Film from Fluorosilane Produced by Isotopically Selective Infrared Multiphoton Dissociation

Published:2009 Issue:5 Volume:52 Page:292-295
ISSN:1882-4749
Container-title:Journal of the Vacuum Society of Japan
language:
Short-container-title:J. Vac. Soc. Jpn.

Author:

OHBA Hironori,SUZUKI Hiroshi,ESAKA Fumitaka,TAGUCHI Tomitsugu,YAMADA Yoichi,YAMAMOTO Hiroyuki,SASASE Masato,YOKOYAMA Atsushi

Publisher

The Vacuum Society of Japan

Subject

Spectroscopy,Surfaces and Interfaces,Instrumentation,General Materials Science

Reference14 articles.

1. An all-silicon linear chain NMR quantum computer

2. The silicon-28 path to the Avogadro constant-first experiments and outlook

3. Growth and Characterization of the Isotopically Enriched 28Si Bulk Single Crystal

4. High-Purity, Isotopically Enriched Bulk Silicon

5. High Purity Isotopically Enriched29Si and30Si Single Crystals: Isotope Separation, Purification, and Growth

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