Author:
SHIOZAWA Kazufumi,NEO Yoichiro,OKADA Morihiro,KUME Hiroshi,MATSUMOTO Takahiro,IKEDO Tomoyuki,TAKAHASHI Masafumi,HASHIGUCHI Gen,MIMURA Hidenori
Publisher
The Vacuum Society of Japan
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics