Universal Expression of Projected Range Distributions for Spherical and Cylindrical Shape Target by Computer Simulation-Reference-Cited by-同舟云学术

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Universal Expression of Projected Range Distributions for Spherical and Cylindrical Shape Target by Computer Simulation

Published:2017 Issue:12 Volume:60 Page:463-466
ISSN:1882-2398
Container-title:Journal of the Vacuum Society of Japan
language:en
Short-container-title:J. Vac. Soc. Jpn.

Author:

TAWARA Shotaro¹,YAMAMOTO Yukio¹,ARAKAWA Masakazu¹,SAIJO Satoshi¹,HORIKAWA Junsei¹,YONEDA Tomoaki¹

Affiliation:

1. Department of Electrical and Electronics Engineering, National Institute of Technology, Fukui College

Publisher

The Vacuum Society of Japan

Subject

Spectroscopy,Surfaces and Interfaces,Instrumentation,General Materials Science

Link

https://www.jstage.jst.go.jp/article/jvsj2/60/12/60_17-PR-053/_pdf

Reference21 articles.

1. 1) J. F. Ziegler: Ion Implantation, Science and Technology 2nd edition (Academic Press, Orlando, Florida, 2012).

2. 2) M. M. M. Bilek: Appl. Surf. Sci., 310 (2014) 3.

3. 3) J. R. Conrad, J. L. Radtke, R. A. Dodd, F. J. Worzala and N. C. Tran: J. Appl. Phys., 62 (1987) 4591.

4. 4) M. Kawashita, F. Miyaji, T. Kokubo, G. H. Takaoka, I. Yamada, Y. Suzuki and K. Kajiyama: Nucl. Instrum. Methods Phys. Res. B, 121 (1997) 323.

5. 5) K. Kajiyama, Y. Suzuki, M. Inoue, T. Kokubo, M. Kawashita and F. Miyaji: Proc. of 11th Int. Conf. Ion Imp. Tech., Austin, Texas, 1995, 816.

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