Universal Expression of Projected Range Distributions for Spherical and Cylindrical Shape Target by Computer Simulation

Author:

TAWARA Shotaro1,YAMAMOTO Yukio1,ARAKAWA Masakazu1,SAIJO Satoshi1,HORIKAWA Junsei1,YONEDA Tomoaki1

Affiliation:

1. Department of Electrical and Electronics Engineering, National Institute of Technology, Fukui College

Publisher

The Vacuum Society of Japan

Subject

Spectroscopy,Surfaces and Interfaces,Instrumentation,General Materials Science

Reference21 articles.

1. 1) J. F. Ziegler: Ion Implantation, Science and Technology 2nd edition (Academic Press, Orlando, Florida, 2012).

2. 2) M. M. M. Bilek: Appl. Surf. Sci., 310 (2014) 3.

3. 3) J. R. Conrad, J. L. Radtke, R. A. Dodd, F. J. Worzala and N. C. Tran: J. Appl. Phys., 62 (1987) 4591.

4. 4) M. Kawashita, F. Miyaji, T. Kokubo, G. H. Takaoka, I. Yamada, Y. Suzuki and K. Kajiyama: Nucl. Instrum. Methods Phys. Res. B, 121 (1997) 323.

5. 5) K. Kajiyama, Y. Suzuki, M. Inoue, T. Kokubo, M. Kawashita and F. Miyaji: Proc. of 11th Int. Conf. Ion Imp. Tech., Austin, Texas, 1995, 816.

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