Thermal Spraying and Regenerative Surface Treatment Technologies for Inner Part of Vacuum Equipment-Reference-Cited by-同舟云学术

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Thermal Spraying and Regenerative Surface Treatment Technologies for Inner Part of Vacuum Equipment

Published:2017 Issue:3 Volume:60 Page:102-104
ISSN:1882-2398
Container-title:Journal of the Vacuum Society of Japan
language:en
Short-container-title:J. Vac. Soc. Jpn.

Author:

MORITA Tadashi¹

Affiliation:

1. Surface Modification Research Center, Future Technology Research Laboratory, ULVAC, Inc.

Publisher

The Vacuum Society of Japan

Subject

Spectroscopy,Surfaces and Interfaces,Instrumentation,General Materials Science

Link

https://www.jstage.jst.go.jp/article/jvsj2/60/3/60_16-RV-045/_pdf

Reference14 articles.

1. 1) Y. Mori (Seiko Epson Corp.): Japanese Unexamined Patent Application Publication, No.1998-238263.

2. 2) Y. Fujiyama (Canon Inc.): Japanese Unexamined Patent Application Publication, No.1986-87861.

3. 3) S. Kuroda: J. Vac. Soc. Jpn., 52 (2009) 631.

4. 4) J. Morimoto and A. Yamaguchi: J. Surf. Finish. Soc. Jpn., 37 (1986) 55.

5. 5) JIS H 9302, Seramikku Yousha Sagyo Hyoujyun (Recommended practice for ceramic sprayed coatings) [in Japanese].

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