Outgassing Properties of Aluminum Alloy with Surface Treatment　—Performance Assessment of Developed Measurement System and Outgassing Rate Measurement

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Outgassing Properties of Aluminum Alloy with Surface Treatment　—Performance Assessment of Developed Measurement System and Outgassing Rate Measurement—

Published:2017 Issue:11 Volume:60 Page:450-456
ISSN:1882-2398
Container-title:Journal of the Vacuum Society of Japan
language:en
Short-container-title:J. Vac. Soc. Jpn.

Author:

OGAWA Naoki¹,YOKOYAMA Koji¹,TERAOKA Hidenobu¹,ISHII Takashi¹,HARIMA Kanako¹,GOTO Moriyoshi¹,KITTAKA Ryouji¹

Affiliation:

1. RORZE CORPORATION

Publisher

The Vacuum Society of Japan

Subject

Spectroscopy,Surfaces and Interfaces,Instrumentation,General Materials Science

Link

https://www.jstage.jst.go.jp/article/jvsj2/60/11/60_16-PR-079/_pdf

Reference9 articles.

1. 1) K. Saito, Y. Sato, S. Inayoshi, Y. Yang and S. Tsukahara: Shinku, 38 (1995) 449.

2. 2) K. Saito, Y. Sato and S. Tsukahara: Shinku, 40 (1997) 728.

3. 3) S. Inayoshi: J. Vac. Soc. Jpn., 58 (2015) 57.

4. 4) Y. Ishikawa: Shinku, 43 (2000) 214.

5. 5) H. Yoshida, K. Arai, M. Hirata and H. Akimichi: Vacuum, 86 (2012) 838.

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