Measurement of Steady State Pressure Distribution and Dynamic Pressure Fluctuations During Sputtering Process-Reference-Cited by-同舟云学术

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Measurement of Steady State Pressure Distribution and Dynamic Pressure Fluctuations During Sputtering Process

Published:2017 Issue:6 Volume:60 Page:220-227
ISSN:1882-2398
Container-title:Journal of the Vacuum Society of Japan
language:en
Short-container-title:J. Vac. Soc. Jpn.

Author:

TAJIRI Shuichi¹,ONISHI Takanori¹,OKANO Yukiko¹,OGAWA Soichi²,MIMA Hiroshi³

Affiliation:

1. Okano Works, Ltd., Micro sensor Division

2. Ogawa Creation Research Laboratory

3. Osaka City University

Publisher

The Vacuum Society of Japan

Subject

Spectroscopy,Surfaces and Interfaces,Instrumentation,General Materials Science

Link

https://www.jstage.jst.go.jp/article/jvsj2/60/6/60_16-OT-026/_pdf

Reference11 articles.

1. 1) S. Tajiri, T. Aozono, A. Okamoto, S. Ogawa and H. Mima: 43rd Preprints of the Joint Symposium on Vacuum, Osaka (2002) p.279.

2. 2) S. Tajiri, T. Aozono, A. Okamoto, S. Ogawa and H. Mima: 44th Preprints of the Joint Symposium on Vacuum, Tokyo (2003) p.86.

3. 3) S. Tajiri, T. Aozono, A. Okamoto, S. Ogawa and H. Mima: 45th Preprints of the Joint Symposium on Vacuum, Osaka (2004) p.108.

4. 4) S. Tajiri, Y. Okano, T. Aozono, A. Okamoto, S. Ogawa and H. Mima: 49th Preprints of the Joint Symposium on Vacuum, Shimane (2008) p.65.

5. 5) S. Tajiri, Y. Okano, T. Okada, T. Aozono, S. Ogawa and H. Mima: 52th Preprints of the Joint Symposium on Vacuum, Tokyo (2011) p.119.

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