Measurement of Silane Concentration in Silane-Hydrogen Gas Mixtures Using a Quartz Friction Pressure Gauge at Low Pressures and Low Silane Concentrations-Reference-Cited by-同舟云学术

Measurement of Silane Concentration in Silane-Hydrogen Gas Mixtures Using a Quartz Friction Pressure Gauge at Low Pressures and Low Silane Concentrations

Published:2015 Issue:5 Volume:58 Page:181-184
ISSN:1882-2398
Container-title:Journal of the Vacuum Society of Japan
language:en
Short-container-title:J. Vac. Soc. Jpn.

Author:

SUZUKI Atsushi¹²,HOJO Hisao³,KOBAYASHI Takichi⁴

Affiliation:

1. Present Address: Nanoscopic Measurement Group, Research Instutute for Measurement and Analytical Instrumentation, National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (AIST)

2. Research Institute of Instrumentation Frontier (RIIF), National Institute of Advanced Industrial Science and Technology AIST

3. Vacuum Products Co.

4. Vacuum Products Instruments Co., Ltd.

Publisher

The Vacuum Society of Japan

Subject

Spectroscopy,Surfaces and Interfaces,Instrumentation,General Materials Science

Reference8 articles.

1. 1) A. Suzuki and H. Nonaka: Jpn. J. Appl. Phys., 47 (2008) 3661.

2. 2) A. Suzuki, M. Karasawa, T. Nagai, H. Nonaka and M. Kondo: J. Vac. Soc. Jpn., 53 (2010) 162.

3. 3) A. Suzuki, A. Kurokawa, T. Nagai, T. Matsui and M. Kondo: J. Vac. Soc. Jpn., 55 (2012) 97.

4. 4) K. Kokubun, M. Hirata, H. Murakami, Y. Toda and M. Ono: Vacuum, 34 (1984) 731.

5. 5) C. R. Wilke: J. Chem. Phys., 18 (1950) 517.

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