International Standardization of Quantitative Surface Analysis by Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy-Reference-Cited by-同舟云学术

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International Standardization of Quantitative Surface Analysis by Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy

Published:2005 Issue:4 Volume:48 Page:261-264
ISSN:0559-8516
Container-title:SHINKU
language:en
Short-container-title:SHINKU

Author:

TANUMA Shigeo¹

Affiliation:

1. Materials Analysis Station, National Institute for Materials Science

Publisher

The Vacuum Society of Japan

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics

Link

https://www.jstage.jst.go.jp/article/jvsj/48/4/48_4_261/_pdf

Reference19 articles.

1. 2) M. P. Seah and I. S. Gilmore: J. Electron Spectrosc. Relat. Phenom., 120 (2001) 93.

2. 3) M. P. Seah and I. S. Gilmore: Surf. Interface Anal., 26 (1998) 908.

3. 4) ISO 18118: -AES & XPS- Guide to the use of experimental relative sensitivity factors for the quantitative analysis of homogeneous materials (2004).

4. 5) K. D. Childs, B. A. Carlson, L. A. La Vanier, J. F. Moulder, D. F. Paul, W. F. Stickle and D. G. Watson: Handbook of Auger Electron Spectroscopy, Third Edition, Physical Electronics Inc., Eden Prairie, MN (1995).

5. 6) K. Yoshihara, R. Shimizu, T. Homma, H. Tokutaka, K. Goto, M. Umehara, D. Fujita, A. Kurokawa, S. Ichimura, C. Oshima, M. Kurahashi, M. Kudo, Y. Hashiguchi, Y. Fukuda, T. Suzuki, T. Ohmura, F. Soeda, K. Tanaka, A. Tanaka, T. Sekine, Y. Shiokawa and T. Hayashi: Surf. Interface Anal., 12 (1988) 125.

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