Author:
SAITO Naoaki,OHKUBO Masataka,UKIBE Masahiro,KUSHINO Akihiro,KUROKAWA Akira,MIZOTA Takeshi,KINUMI Tomoya,SHIGERI Yasushi,ICHIMURA Shingo
Publisher
The Vacuum Society of Japan
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics