DC magnetron sputtered ITO films applied with indium tin oxide targets.-Reference-Cited by-同舟云学术

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DC magnetron sputtered ITO films applied with indium tin oxide targets.

Published:1987 Issue:6 Volume:30 Page:546-554
ISSN:0559-8516
Container-title:SHINKU
language:
Short-container-title:SHINKU

Author:

KIMURA Hiroshi,WATANABE Hiroshi,ISHIHARA Satoshi,SUZUKI Yoshio,ITO Takashi

Publisher

The Vacuum Society of Japan

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics

Cited by 19 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of annealing treatment of indium tin oxide thin films on film properties and transparent antenna properties;Thin Solid Films;2024-04

2. The correlation between electrical properties and surface plasmonic properties on ITO films with diffraction grating;Optical Review;2021-08-02

3. Influence of dopant species and concentration on grain boundary scattering in degenerately doped In2O3 thin films;Thin Solid Films;2016-09

4. Fabrication and characterization of ferroelectric-gate thin-film transistors with an amorphous oxide semiconductor, amorphous In–Ga–Zn–O;Japanese Journal of Applied Physics;2014-10-27

5. Changes in electrical and structural properties of indium oxide thin films through post-deposition annealing;Thin Solid Films;2011-10

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