1. 1) N. Matuda: J. Vac. Soc. Jpn., 52 (2009) 407.
2. 2) J. N. Chubb: Proc. 4th International Vacuum Congress, MIT, Cambridge (1968) 433.
3. 3) S. Sukenobu: in 38th Shinkukakidaigaku text (Textbook of 38th vacuum summer seminar), ed. The Vacuum Society of Japan, (1998) p117 [in Japanese].
4. 4) R. J. Cole: Prog. Astronaut. Aeronaut., 51 (1977) 261.
5. 5) J. Gómez-Goñi and P. J. Lobo: J. Vac. Sci. Technol. A, 21 (2003) 1452.