In-situ Measurement of the Effective Pumping Speed of High Vacuum Pump and the Sensitivity of Ionization Gauge by Combining the Standard Conductance Element and the Conductance Modulation Method-Reference-Cited by-同舟云学术

In-situ Measurement of the Effective Pumping Speed of High Vacuum Pump and the Sensitivity of Ionization Gauge by Combining the Standard Conductance Element and the Conductance Modulation Method

Published:2012 Issue:5 Volume:55 Page:226-232
ISSN:1882-2398
Container-title:Journal of the Vacuum Society of Japan
language:en
Short-container-title:J. Vac. Soc. Jpn.

Author:

YOSHIDA Hajime,AKIMICHI Hitoshi,KOBATA Tokihiko

Publisher

The Vacuum Society of Japan

Subject

Spectroscopy,Surfaces and Interfaces,Instrumentation,General Materials Science

Reference11 articles.

1. 2) H. Yoshida, K. Arai, H. Akimichi and T. Kobata: (Measurement to be published).

2. 4) T. Ogiwara: in 46^th Shinku kaki daigaku text (Textbook of 46^th vacuum summer seminar), ed. The Vacuum Society of Japan, (2006) p. 95 [in Japanese].

3. 5) J. M. Lafferty ed.: Foundations of Vacuum Science and technology (John Wiley and Sons, Inc., New York, 1998) p. 96.

4. 6) JISB8328 Vacuum technology—Turbomolecular pumps—Measurement of performance characteristics, Japan standards association (2009).

5. 7) S. Sukenobu: in 46^th Shinku kaki daigaku text (Textbook of 46^th vacuum summer seminar), ed. The Vacuum Society of Japan, (2006) p. 200 [in Japanese].

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