Properties of aluminum-doped zinc oxide films deposited by high rate mid-frequency reactive magnetron sputtering
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.1339019
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4. Effect of N2O-doped buffer layer on the optical properties of ZnO films grown on glass substrates using high-energy H2O generated by catalytic reaction;JPN J APPL PHYS;2016
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