Rapid thermal chemical vapor deposition of zirconium oxide for metal-oxide-semiconductor field effect transistor application-Reference-Cited by-同舟云学术

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Rapid thermal chemical vapor deposition of zirconium oxide for metal-oxide-semiconductor field effect transistor application

Published:2001 Issue:5 Volume:19 Page:1782
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Chang Jane P.,Lin You-Sheng,Chu Karen

Publisher

American Vacuum Society

Subject

General Engineering

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