Search for pressure dependence in the sensitivity of several common types of hot‐cathode ionization gauges for total pressures down to 10−7 Pa-Reference-Cited by-同舟云学术

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Search for pressure dependence in the sensitivity of several common types of hot‐cathode ionization gauges for total pressures down to 10−7 Pa

Published:1991-09 Issue:5 Volume:9 Page:2757-2765
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Filippelli Albert R.,Dittmann Sharrill

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.577195

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Pressure Gauges;A Users Guide to Vacuum Technology;2023-11-20

2. A review on hot cathode ionisation gauges with focus on a suitable design for measurement accuracy and stability;Vacuum;2020-09

3. Numerical simulation of relative sensitivity factor of Bayard–Alpert gauge;Vacuum;2020-09

5. Simulation of Relative Sensitivity Coefficient of Bayard-Alpert Gauge;Journal of the Vacuum Society of Japan;2016

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