Vapor phase infiltration of aluminum oxide into benzocyclobutene-based polymer dielectrics to increase adhesion strength to thin film metal interconnects-Reference-Cited by-同舟云学术

Vapor phase infiltration of aluminum oxide into benzocyclobutene-based polymer dielectrics to increase adhesion strength to thin film metal interconnects

Published:2020-05 Issue:3 Volume:38 Page:033210
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Dwarakanath Shreya¹²^ORCID,Raj Pulugurtha Markondeya¹³^ORCID,Kondekar Neha²^ORCID,Losego Mark D.²^ORCID,Tummala Rao¹²^ORCID

Affiliation:

1. 3D Systems Packaging Research Center, Georgia Institute of Technology, Atlanta, Georgia 30332

2. Department of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332

3. Department of Biomedical Engineering, Florida International University, Miami, Florida 32901

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5141475

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