Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions-Reference-Cited by-同舟云学术

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Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions

Published:2008 Issue:1 Volume:26 Page:362
ISSN:1071-1023
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Petersen Dirch Hjorth,Lin Rong,Hansen Torben Mikael,Rosseel Erik,Vandervorst Wilfried,Markvardsen Christian,Kjær Daniel,Nielsen Peter Folmer

Publisher

American Vacuum Society

Subject

Electrical and Electronic Engineering,Condensed Matter Physics

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