Sticking probabilities of H2O and Al(CH3)3 during atomic layer deposition of Al2O3 extracted from their impact on film conformality-Reference-Cited by-同舟云学术

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Sticking probabilities of H2O and Al(CH3)3 during atomic layer deposition of Al2O3 extracted from their impact on film conformality

Published:2019-05 Issue:3 Volume:37 Page:030908
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Arts Karsten¹,Vandalon Vincent¹,Puurunen Riikka L.²³,Utriainen Mikko³,Gao Feng³,Kessels Wilhelmus M. M. (Erwin)¹^ORCID,Knoops Harm C. M.¹⁴

Affiliation:

1. Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands

2. Aalto University School of Chemical Engineering, Aalto University, Kemistintie 1, Espoo, P.O. Box 16100, FI-00076 Aalto, Finland

3. VTT Technical Research Centre of Finland, Tietotie 3, 02044 Espoo, Finland

4. Oxford Instruments Plasma Technology, North End, Bristol BS49 4AP, United Kingdom

Funder

Tekes

Stichting voor de Technische Wetenschappen

Finnish Centre of Excellence in Atomic Layer Deposition

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5093620

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1. Adsorption of dimethylaluminum isopropoxide (DMAI) on the Al2O3 surface: A machine-learning potential study;Journal of Science: Advanced Materials and Devices;2024-09

2. Exploring TMA and H2O Flow Rate Effects on Al2O3 Thin Film Deposition by Thermal ALD: Insights from Zero-Dimensional Modeling;Coatings;2024-05-07

3. Conformal High-Aspect-Ratio Solid Electrolyte Thin Films for Li-Ion Batteries by Atomic Layer Deposition;ACS Applied Electronic Materials;2024-03-08

4. Modeling the impact of incomplete conformality during atomic layer processing;Solid-State Electronics;2024-01

5. An atomic layer deposition diffusion–reaction model for porous media with different particle geometries;Physical Chemistry Chemical Physics;2024

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