Effects of substrate-controlled-orientation on the electrical performance of sputtered BaTiO3 thin films
Author:
Affiliation:
1. College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China
2. Peter Grunberg Research Center, Nanjing University of Posts and Telecommunications, Nanjing 210003, China
Funder
National Natural Science Foundation of China
Basic Research Program of Jiangsu Province
Publisher
American Vacuum Society
Subject
Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials
Link
http://avs.scitation.org/doi/pdf/10.1116/1.5131542
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Effect of sputtering-target composition on the structure, dielectric, ferroelectric, and energy storage properties of highly (00l)-oriented Ba(ZrxTi1–x)O3 films;Journal of Vacuum Science & Technology B;2023-06-29
2. The effect of bottom electrode on structure and electrical properties of BaZr0.15Ti0.85O3 films on SrTiO3 substrates;Journal of Materials Science: Materials in Electronics;2023-03
3. Investigation of electric displacement characteristics in sol–gel derived BaTiO3 polycrystalline films;Journal of Materials Science: Materials in Electronics;2023-02-24
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