Linear and nonlinear filtering of spectra-Reference-Cited by-同舟云学术

Linear and nonlinear filtering of spectra

Published:2019-09 Issue:5 Volume:37 Page:051205
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Aspnes David E.¹²,Le Van L.¹³,Kim Young D.¹

Affiliation:

1. Department of Physics, Kyung Hee University, Seoul 02447, Republic of Korea

2. Department of Physics, North Carolina State University, Raleigh, North Carolina 27695-8202

3. Laboratory of Plasma Technology, Institute of Materials Science, Vietnam Academy of Science and Technology, Hanoi 100000, Vietnam

Funder

Development of Industrial Measuring Equipment Technology

World Class University Program

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5118230

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