Tungsten: An alternative to gold for x-ray masks
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Published:1987-01
Issue:1
Volume:5
Page:283
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:
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Short-container-title:J. Vac. Sci. Technol. B
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
34 articles.
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1. X-ray Lithography;Nano-Lithography;2013-03-07
2. Sputtered tungsten films on polyimide, an application for X-ray masks;Solid-State Electronics;1999-06
3. Masks for high aspect ratio x-ray lithography;Journal of Micromechanics and Microengineering;1996-06-01
4. Tungsten absorber on silicon membrane;Applied Surface Science;1996-02
5. Electron beam-induced deposition of tungsten;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1994-09