Optical spectroscopic analyses of OH incorporation into SiO[sub 2] films deposited from O[sub 2]/tetraethoxysilane plasmas-Reference-Cited by-同舟云学术

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Optical spectroscopic analyses of OH incorporation into SiO[sub 2] films deposited from O[sub 2]/tetraethoxysilane plasmas

Published:2000 Issue:5 Volume:18 Page:2452
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:J. Vac. Sci. Technol. A

Author:

Goullet A.,Vallée C.,Granier A.,Turban G.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

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