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2. Nanofluidic channels fabricated by e-beam lithography and polymer reflow sealing;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2010-11
3. Mold Fabrication for 3D Dual Damascene Imprinting;Nanoscale Research Letters;2010-01-30
4. Isopropanol/water as a developer for poly(dimethylglutarimide);Journal of Micro/Nanolithography, MEMS, and MOEMS;2008-10-01
5. High resolution electron beam lithography of PMGI using solvent developers;Microelectronic Engineering;2008-05