Electron-beam/ultraviolet hybrid exposure combined with novel bilayer resist system for a 0.15 μm T-shaped gate fabrication process

Author:

Takano H.

Publisher

American Vacuum Society

Subject

General Engineering

Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Mixture of ZEP and PMMA with varying ratios for tunable sensitivity as a lift-off resist with controllable undercut;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-11

2. Nanofluidic channels fabricated by e-beam lithography and polymer reflow sealing;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2010-11

3. Mold Fabrication for 3D Dual Damascene Imprinting;Nanoscale Research Letters;2010-01-30

4. Isopropanol/water as a developer for poly(dimethylglutarimide);Journal of Micro/Nanolithography, MEMS, and MOEMS;2008-10-01

5. High resolution electron beam lithography of PMGI using solvent developers;Microelectronic Engineering;2008-05

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