Possible mechanisms in atomic force microscope-induced nano-oxidation lithography in epitaxial La0.67Ba0.33MnO3-δ thin films-Reference-Cited by-同舟云学术

Possible mechanisms in atomic force microscope-induced nano-oxidation lithography in epitaxial La0.67Ba0.33MnO3-δ thin films

Published:2016-03 Issue:2 Volume:34 Page:021601
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Yong Grace J.¹,Vanderlinde William E.²,Tanyi Ekembu Kevin³,Schaefer David M.⁴,Stumpf Christopher⁴,Kolagani Rajeswari M.⁴

Affiliation:

1. Department of Physics, Astronomy & Geosciences, Towson University, Towson, Maryland 21043

2. Laboratory for Physical Sciences, 8050 Green Mead Drive, College Park, Maryland 20740

3. Physics Department, Norfolk University, Norfolk, Virginia 23504

4. Department of Physics, Astronomy and Geosciences, Towson University, Towson, Maryland 21043

Funder

School of Emerging Technologies, Towson University

National Science Foundation (NSF)

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://scitation.aip.org/deliver/fulltext/avs/journal/jvstb/34/2/1.4941243.pdf?itemId=/content/avs/journal/jvstb/34/2/10.1116/1.4941243&mimeType=pdf&containerItemId=content/avs/journal/jvstb

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