Impurity back diffusion through an ultrahigh vacuum turbomolecular pump under large gas throughput-Reference-Cited by-同舟云学术

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Impurity back diffusion through an ultrahigh vacuum turbomolecular pump under large gas throughput

Published:1996-09 Issue:5 Volume:14 Page:2958-2962
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Konishi Nobuhiro,Shibata Tadashi,Ohmi Tadahiro

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.580251

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. High Flow Systems;A Users Guide to Vacuum Technology;2023-11-20

2. Rough Vacuum Pumping;A Users Guide to Vacuum Technology;2023-11-20

3. Vacuum Pumps;Vacuum Technology

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