Miniature touch mode capacitance vacuum gauge with circular diaphragm-Reference-Cited by-同舟云学术

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Miniature touch mode capacitance vacuum gauge with circular diaphragm

Published:2021-12 Issue:6 Volume:39 Page:064203
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Han Xiaodong¹,Li Gang²,Xu Mahui³,Yan Huangping¹,Feng Yongjian¹,Li Detian¹²^ORCID

Affiliation:

1. School of Aerospace Engineering, Xiamen University, Fujian 361102, China

2. Lanzhou Institute of Physics, Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou 730000, China

3. College of Mechanical Engineering, Jiangsu University of Technology, Changzhou 213001, China

Funder

National Natural Science Foundation of China

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

https://avs.scitation.org/doi/pdf/10.1116/6.0001332

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Temperature-Insensitive Resonant Low-Pressure Microsensor Based on Au–Si Eutectic Wafer Bonding;IEEE Transactions on Electron Devices;2022-12

2. A Resonant Low-Pressure Microsensor With Low Temperature Disturbance;IEEE Sensors Journal;2022-06-01

3. Miniature capacitance diaphragm gauge for absolute vacuum measurement;Measurement;2022-05

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