Thin‐film deposition using low‐energy ion beams (3) Mg+ ion‐beam deposition and analysis of deposits-Reference-Cited by-同舟云学术

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Thin‐film deposition using low‐energy ion beams (3) Mg+ ion‐beam deposition and analysis of deposits

Published:1977-05 Issue:3 Volume:14 Page:836-839
ISSN:0022-5355
Container-title:Journal of Vacuum Science and Technology
language:en
Short-container-title:Journal of Vacuum Science and Technology

Author:

Amano J.,Lawson R. P. W.

Publisher

American Vacuum Society

Subject

General Engineering

Link

http://avs.scitation.org/doi/pdf/10.1116/1.569281

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Cluster–surface collisions by phase-space compressed guided-ion beam methods;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1999-08

2. Construction and applications of a dual mass‐selected low‐energy ion beam system;Review of Scientific Instruments;1991-10

3. ION BEAM DEPOSITION OF Co-Cr FILMS BY USING OPPOSED TARGETS SPUTTERING TECHNIQUE;Journal of the Magnetics Society of Japan;1989

4. Ion Beam Deposition;MRS Bulletin;1987-03

5. Metal Film Sputtering Technique to Coat Teeth for Preventing Dental Caries. A Preliminary Study;Japanese Journal of Applied Physics;1987-01-20

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