Real-time spectro-ellipsometric characterization of Si/Si[sub 1−x]Ge[sub x] multiple quantum wells grown on Si(100) substrates
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Published:2002
Issue:4
Volume:20
Page:1527
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:en
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Short-container-title:J. Vac. Sci. Technol. B
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
2 articles.
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