Study on beam size correction free from Coulomb interaction
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Published:2002
Issue:1
Volume:20
Page:138
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:en
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Short-container-title:J. Vac. Sci. Technol. B
Author:
Takenaka H.,Sasago M.
Publisher
American Vacuum Society
Subject
General Engineering